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$9999.00
≥100 Ton
Model No. : | Hexafluoroethane |
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Zibo, Shandong, China
Product description
Hexafluoroethane (C2F6), also known as perfluoroethane, is a kind of colorless, odorless, non-flammable inert gas. Its melting point is 100.6 ℃, boiling point is 78.2 ℃, slightly soluble in water. Due to its non-toxic, odorless and high stability, hexafluoroethane is widely used in the semiconductor manufacturing process. Hexafluoroethane, as a dry etchant, has the advantages of very small edge-side etching, high etching rate and high accuracy, which can meet the requirements of semiconductor manufacturing process for small linewidth.
Hexafluoroethane Quality Specification:
Application:
Items
单位 Unit
Indexs
C2F6
Vol.%
≥99.999
O2+Ar
Vol.ppm
<1
N2
Vol.ppm
<5
CO
Vol.ppm
<0.5
CO2
Vol.ppm
<0.5
H2
Vol.ppm
<0.5
Halohydrocarbon
Vol.ppm
<5
CH4
Vol.ppm
<1
H2O
Vol.ppm
<2
Acidity(Measured by HF)
Wt. ppm
<0.1
Total impurity content
Mol.ppm
≤10
Electronic grade hexafluoroethane is mainly used in the manufacturing process of semiconductor materials and semiconductor devices as etching agent and cleaning agent, as well as insulation gas and high dielectric strength coolant.
Packaging and storage:
Hexafluoroethane is filled in clean and dry seamless cylinders with special treatment. The cylinder volumes are 4L, 8L, 10L, 12.5L and 40L etc. Packaging specifications can be customized according to customers' requirements.
Zibo, Shandong, China
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